Plasma characteristics of a rf ion source are investigated by emission spectroscopy . the spatiotemporal spectral line intensities of the first three atomic lines in hydrogen bahner series ( = 656 . 28 , 486 . 13 , 434 . 05nm ) of rf ion source plasma , are measured with calibrated optical multichannel analyzer ( oma ) . some plasma parameters , including electron temperature , hydrogen atom density and hydrogen ion density , are calculated and analyzed using partial local thermodynamic equilibrium ( plte ) theory and abel transform 實(shí)驗(yàn)采用絕對(duì)定標(biāo)后的光學(xué)多道分析系統(tǒng)( oma )測(cè)定了離子源等離子體不同時(shí)間和空間位置的氫原子巴耳末譜線系中前三條譜線( = 656 . 28 , 486 . 13 , 434 . 05nm )的強(qiáng)度,并采用plte的理論和abel變換方法,計(jì)算出了高頻離子源等離子體的電子溫度、氫原子濃度、氫離子濃度等參數(shù)在放電的不同階段和徑向分布情況,并進(jìn)行了簡要分析。